EDS (Elemental Analysis) / EDX Analysis

Energy Dispersive X-Ray Spectroscopy (EDS): While in a Scanning Electron Microscope (SEM), samples are exposed to high energy electrons in a vacuum, which generates X-rays through secondary electron transitions.  Variations in electron configuration specific to each element generate different energy electrons, and thus different signature energy peaks, indicating which elements are present in the sample.  Analysis is performed only on areas which are exposed to the electron beam, facilitating precise control of the analyzed area.  This means the composition of very small areas or particles in a sample can be taken.  Since EDS is performed in the SEM chamber, a quick and easy interrogation of the surface materials as viewed on the SEM is possible.  This can be expanded to include the entire sample, please see our Elemental Mapping page.  Additionally, relative amount of the elements present can be calculated, generating composition percentages.


  • Spectral information can be gathered from areas as small as 1 cubic micron
  • All elements analyzed simultaneously from beryllium (Be) on up the periodic table
  • Relative concentrations in weight, oxide, or atomic formula percentages can be obtained from the EDS spectra
  • State of the art detectors, used here at MicroVision Labs, allow for rapid analysis and compositional analysis in less than a minute
  • Full data sets are indexed, allowing for additional data analysis
  • Multiple data points, line profiles, or regions can be compared in a single imaged area

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